Company Filing History:
Years Active: 2001
Title: Richard Ross - Innovator in Electrostatic Chuck Technology
Introduction
Richard Ross is a notable inventor based in San Diego, CA. He has made significant contributions to the field of microelectronics through his innovative designs and patents. His work primarily focuses on electrostatic holding devices, which are essential in the manufacturing of semiconductor wafers.
Latest Patents
Richard Ross holds a patent for an "Electrostatic chuck having replaceable dielectric cover." This invention is an electrostatic holding device designed to hold semiconductor wafers and similar materials during microelectronic device manufacturing operations. The device features a circular, electrically conductive wafer support with a rounded periphery and an annular border region. It includes a flat, concentric, raised central plateau with an electrically conductive top surface. The plateau has a tapered circumferential edge that extends down to the annular border region. A non-electrically conductive coating is applied to the rounded periphery, the border region, and the tapered edge, ensuring that the coating is coplanar with the conductive top surface of the central plateau. A removable dielectric sheet overlays the top surface, providing a uniform electric field that holds the wafer securely in place.
Career Highlights
Richard Ross is associated with Electron Vision Corporation, where he continues to develop and refine technologies that enhance the efficiency of microelectronic manufacturing processes. His innovative approach has led to advancements in the design and functionality of electrostatic chucks.
Collaborations
Throughout his career, Richard has collaborated with notable colleagues, including William R. Livesay and David M. Rose. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies.
Conclusion
Richard Ross is a prominent figure in the field of microelectronics, with a focus on electrostatic chuck technology. His contributions have significantly impacted the manufacturing processes of semiconductor devices. His innovative spirit and collaborative efforts continue to drive advancements in this critical industry.