Company Filing History:
Years Active: 2019-2024
Title: Innovations by Richard Phillips in Atomic Layer Deposition
Introduction
Richard Phillips is an accomplished inventor based in Tualatin, Oregon, with a remarkable portfolio of nine patents. His work primarily focuses on advancements in atomic layer deposition (ALD) technology, which is crucial for various applications in semiconductor manufacturing and materials science.
Latest Patents
One of Richard's latest patents is titled "Pedestals for Modulating Film Properties in Atomic Layer Deposition (ALD) Substrate Processing Chambers." This innovative system is designed to deposit a film on a substrate using atomic layer deposition. It features a pedestal that supports the substrate, with a first annular recess that extends downwardly from the top surface of the pedestal. This design allows for precise control over the film deposition process. Another significant patent involves "Thickness Compensation by Modulation of Number of Deposition Cycles as a Function of Chamber Accumulation for Wafer to Wafer Film Thickness Matching." This method enhances the accuracy of ALD by compensating for the amount of accumulated deposition material within the chamber, ensuring consistent film thickness across multiple substrates.
Career Highlights
Richard Phillips is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His contributions to the field of atomic layer deposition have been instrumental in advancing the technology and improving manufacturing processes.
Collaborations
Richard has collaborated with talented coworkers such as Adrien Lavoie and Pulkit Agarwal, contributing to innovative projects and enhancing the capabilities of ALD technology.
Conclusion
Richard Phillips is a notable inventor whose work in atomic layer deposition has significantly impacted the semiconductor industry. His patents reflect a commitment to innovation and excellence in technology.
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