This inventor holds 1 USPTO granted patent. Top assignee: Wisconsin Alumni Research Foundation. Active years: 1991.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1991
Title: Richard K Cole, III: Innovator in X-ray Lithography
Introduction
Richard K Cole, III is a notable inventor based in Stoughton, WI (US). He has made significant contributions to the field of X-ray lithography, particularly with his innovative patent that enhances the efficiency and effectiveness of this technology. His work is instrumental in advancing the capabilities of X-ray lithography, which is crucial for various applications in semiconductor manufacturing and materials science.
Latest Patents
Richard K Cole, III holds a patent for an X-ray lithography beamline method and apparatus. This invention involves a beamline that receives a fan of synchrotron radiation through a first mirror with a concave/concave (toroidal) shape. The mirror collects the fan of X-rays and partially collimates the beam horizontally. The beam is then intercepted by a second refocusing mirror, which has a saddle toroidal shape, allowing for precise collimation and focusing of the X-rays. A third flat mirror can pivot to change the angle of incidence, enabling the beam to scan across the image plane. The design of the two toroidal mirrors ensures a uniform image with a consistent power distribution in the beam, making it well-suited for the requirements of X-ray lithography.
Career Highlights
Richard K Cole, III is associated with the Wisconsin Alumni Research Foundation, where he continues to contribute to research and development in the field of X-ray lithography. His innovative approach and technical expertise have positioned him as a key figure in advancing this technology.
Collaborations
Richard has collaborated with Franco Cerrina, a fellow innovator in the field. Their partnership has fostered advancements in X-ray lithography techniques and applications.
Conclusion
Richard K Cole, III is a prominent inventor whose work in X-ray lithography has made a significant impact on the field. His innovative patent demonstrates his commitment to advancing technology and improving processes in semiconductor manufacturing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile