Saratoga Springs, NY, United States of America

Richard H Gaylord


Average Co-Inventor Count = 2.4

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2014-2017

where 'Filed Patents' based on already Granted Patents

2 patents (USPTO):

Title: Richard H. Gaylord: Innovator in Semiconductor Technology

Introduction

Richard H. Gaylord is a prominent inventor based in Saratoga Springs, NY (US). He has made significant contributions to the field of semiconductor technology, holding two patents that showcase his innovative approaches to gas phase oxide removal and passivation processes.

Latest Patents

His latest patents include "Gas phase oxide removal and passivation of germanium-containing semiconductors and compound semiconductors." This invention discloses a method for processing semiconductor substrates, which involves exposing a substrate containing germanium or compound semiconductors to a process gas that passivates the surface with sulfur. Another embodiment of this patent addresses the removal of oxidized layers from the substrate using a combination of hydrogen fluoride (HF) gas and ammonia (NH3) gas before the passivation process.

The second patent, "Combined silicon oxide etch and contamination removal process," describes a method for forming semiconductor devices. This process involves etching a substrate with two materials, where the first material is etched at a higher rate than the second material. This innovative approach allows for the effective exposure and etching of the second material using a reactive gas plasma.

Career Highlights

Richard H. Gaylord is associated with Tokyo Electron Limited, a leading company in the semiconductor industry. His work has significantly advanced the understanding and processing of semiconductor materials, contributing to the development of more efficient devices.

Collaborations

Some of his notable coworkers include Blaze J. Messer and Kaushik Arun Kumar, who have collaborated with him on various projects within the semiconductor field.

Conclusion

Richard H. Gaylord's contributions to semiconductor technology through his innovative patents highlight his expertise and commitment to advancing the industry. His work continues to influence the development of new semiconductor devices and processes.

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