Company Filing History:
Years Active: 1999-2003
Title: The Innovative Contributions of Richard Blume
Introduction
Richard Blume is a notable inventor based in San Jose, CA, who has made significant contributions to the field of semiconductor device fabrication. With a total of 4 patents to his name, Blume's work focuses on enhancing the efficiency and effectiveness of plasma chambers used in the manufacturing process.
Latest Patents
One of Blume's latest patents involves a method for adjusting the cathode DC bias in a plasma chamber. This method is crucial for fabricating semiconductor devices. The invention includes a dielectric shield that is strategically positioned between the plasma and specific grounded components of the chamber, such as the chamber wall. The adjustment of the cathode DC bias is achieved by controlling various parameters, including the surface area blocked by the dielectric shield, the thickness of the dielectric, the gap between the shield and the chamber wall, and the dielectric constant of the material used. Additionally, the invention features a plasma chamber equipped with an exhaust baffle that contains sinuous passages. These passages are designed to prevent plasma from extending beyond the outlet, thereby reducing unwanted particle deposition on exhaust pump components and lowering the cathode DC bias.
Career Highlights
Richard Blume is currently employed at Applied Materials, Inc., a leading company in the semiconductor manufacturing industry. His innovative work has contributed to advancements in the technology used for semiconductor fabrication, making processes more efficient and reliable.
Collaborations
Throughout his career, Blume has collaborated with talented individuals such as Evans Yip Lee and Michael D Welch. These collaborations have further enhanced the quality and impact of his inventions.
Conclusion
Richard Blume's contributions to the field of semiconductor device fabrication through his innovative patents demonstrate his expertise and commitment to advancing technology. His work continues to influence the industry positively.