The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 1999
Filed:
Jul. 14, 1997
Michael Dutcher, Fremont, CA (US);
Richard Blume, San Jose, CA (US);
Hans Petrusk, Kirtland, OH (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An improved, process compatible fastener is especially useful for securing a member, such as a wafer clamp ring, to an assembly for use in a process environment. The fastener is of a simple design, such that it is readily manufactured, and such that it is not a source of contamination. In particular, an integrated fastener includes both a metal fastener and a cone shaped metal lock washer within a single fastener assembly, such that a single fastener is used for accomplish the function of a screw and a washer. All surfaces of the fastener that are exposed within the process environment are encapsulated in a process compatible material. In this way, the fastener may be secured in the process environment in a single operation without leaving any gaps or partially exposed surfaces that may introduce contaminants into the process environment, such that the integrated fastener also provides the function of a process compatible cap.