Austin, TX, United States of America

Richard A Marsh


Average Co-Inventor Count = 3.6

ph-index = 4

Forward Citations = 1,036(Granted Patents)


Location History:

  • Austin, CA (US) (1998)
  • Austin, TX (US) (1999 - 2000)

Company Filing History:


Years Active: 1998-2000

where 'Filed Patents' based on already Granted Patents

4 patents (USPTO):

Title: The Innovative Contributions of Richard A. Marsh

Introduction

Richard A. Marsh is a notable inventor based in Austin, TX (US), recognized for his significant contributions to technology and engineering. With a total of 4 patents, he has made strides in the field of processing substances and wafer technology. His work has been instrumental in advancing methods that enhance efficiency and precision in various applications.

Latest Patents

One of Richard's latest patents is focused on the "Measurement of quantity of incompressible substance in a closed container." This invention outlines a process and apparatus for delivering a processing substance from a storage vessel to a processing station. The method involves closing the volume enclosed by the storage vessel and conduits, performing pressure measurements, and calculating the quantity of processing substance based on these measurements.

Another significant patent is the "Heater with shadow ring and purge above wafer surface." This invention provides a method and apparatus for supporting a wafer in a processing chamber. The design includes a heater pedestal that supports and heats the wafer from below, while a shadow ring inhibits the deposition of process fluids near the wafer edge. This innovative approach enhances the efficiency of wafer processing by preventing unwanted material accumulation.

Career Highlights

Richard A. Marsh is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at Applied Materials has allowed him to develop and refine technologies that are crucial for the semiconductor industry. His innovative spirit and technical expertise have made a lasting impact on the field.

Collaborations

Throughout his career, Richard has collaborated with talented individuals such as Alan F. Morrison and Salvador P. Umotoy. These collaborations have fostered an environment of creativity and innovation, leading to the development of groundbreaking technologies.

Conclusion

Richard A. Marsh's contributions to the field of technology through his patents and work at Applied Materials, Inc. highlight his role as a key innovator. His inventions not only advance the industry but also pave the way for future developments in processing technologies.

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