Pleasant Valley, NY, United States of America

Richard A Ferguson


Average Co-Inventor Count = 3.4

ph-index = 11

Forward Citations = 661(Granted Patents)


Location History:

  • Dutchess County, NY (US) (1996 - 1998)
  • Pleasant Valley, NY (US) (1999 - 2006)

Company Filing History:


Years Active: 1996-2006

where 'Filed Patents' based on already Granted Patents

13 patents (USPTO):

Title: **The Innovative Contributions of Richard A. Ferguson**

Introduction

Richard A. Ferguson, based in Pleasant Valley, NY, is a prolific inventor known for his contributions to photolithography and semiconductor manufacturing. With 13 patents to his name, Ferguson has been instrumental in advancing technologies that enhance precision in mask layout optimization.

Latest Patents

One of Ferguson's latest patents is titled "Binary OPC for Assist Feature Layout Optimization." This innovative method focuses on the formation of a photolithographic mask layout with Sub-Resolution Assist Feature (SRAF) elements. The process involves correcting for proximity effects in pattern imaging through several key steps, including:

1. Developing a layout of mask features for printing main pattern features.

2. Designing a table of SRAF element data that includes:

- Spacing of main pattern features and SRAF elements.

- Applying SRAF elements to the mask layout based on the spacing dynamics.

- Legalizing SRAF elements according to specific style options.

- Providing a modified layout for the target pattern that identifies problem edge segments at risk of causing printing defects.

- Applying a selected bias to these problem areas to mitigate risks of SRAF element loss.

- Outputting a modified pattern that effectively removes regions of SRAF element loss.

This advanced method enhances the reliability and efficiency of semiconductor fabrication.

Career Highlights

Throughout his career, Richard A. Ferguson has worked with notable corporations including IBM and Lockheed Martin Corporation. His innovations have not only influenced the companies’ growth but also the broader semiconductor industry. His expertise and patent portfolio position him as a key player in the field.

Collaborations

Ferguson has collaborated with fellow innovators such as Lars W. Liebmann and Alfred K. Wong. These professional relationships have further enriched his experience and contributed to his success as an inventor.

Conclusion

Richard A. Ferguson's contributions to the field of photolithography and semiconductor technology exemplify the spirit of innovation. His dedication to developing methods that optimize mask layouts showcases his commitment to advancing electronic manufacturing processes. Through his work, Ferguson continues to leave a lasting impact on the technology landscape.

This text is generated by artificial intelligence and may not be accurate.
Please report any incorrect information to support@idiyas.com
Loading…