Company Filing History:
Years Active: 2002
Title: Rex Lu - Innovator in Chemical Mechanical Polishing Technology
Introduction
Rex Lu is a notable inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of chemical mechanical polishing, which is essential in semiconductor manufacturing. His innovative approach has led to the development of a unique cleaning apparatus that enhances the efficiency of polishing processes.
Latest Patents
Rex Lu holds a patent for a "Pad conditioner cleaning apparatus." This invention includes a pad conditioner with a conditioner head, a cleaning cup designed to receive and clean the conditioner head, and a fluid dispenser that dispenses cleaning fluid onto the conditioner head. This invention is crucial for maintaining the performance of polishing equipment.
Career Highlights
Rex Lu is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work focuses on improving the efficiency and effectiveness of chemical mechanical polishing processes. His expertise in this area has made him a valuable asset to his team and the company.
Collaborations
Rex has collaborated with talented coworkers, including Raijiro Koga and Hiromi Tsuruta. Their combined efforts contribute to the advancement of technology in the semiconductor field.
Conclusion
Rex Lu's innovative contributions to chemical mechanical polishing technology demonstrate his commitment to enhancing manufacturing processes. His patent for the pad conditioner cleaning apparatus is a testament to his ingenuity and expertise in the industry.