Company Filing History:
Years Active: 1996
Title: Ray Paul - Innovator in Electron Beam Inspection Technology
Introduction
Ray Paul is a notable inventor based in Palo Alto, California. He has made significant contributions to the field of particle scanning systems and automatic inspection systems. His innovative work has led to the development of a unique electron beam inspection system.
Latest Patents
Ray Paul holds 1 patent for his invention titled "Electron beam inspection system and method." This patent describes various embodiments of a method and apparatus for a particle scanning system. The system directs a particle beam at the surface of a substrate for scanning purposes. It includes a selection of detectors to detect secondary particles, back-scattered particles, and transmitted particles from the substrate. The substrate is mounted on an x-y stage, allowing it to have at least one degree of freedom during scanning. Additionally, the substrate is subjected to an electric field to accelerate the secondary particles. The system is designed to accurately measure the position of the substrate concerning the charged particle beam. It also features optical alignment means for initial alignment and a vacuum means for efficient operation.
Career Highlights
Ray Paul is associated with Kla Instruments Corporation, where he has been instrumental in advancing inspection technologies. His work has significantly impacted the efficiency and accuracy of substrate inspection processes.
Collaborations
Ray has collaborated with notable colleagues, including Dan Meisburger and Alan D Brodie, contributing to various projects and innovations in the field.
Conclusion
Ray Paul's contributions to electron beam inspection technology exemplify his innovative spirit and dedication to advancing inspection systems. His work continues to influence the industry and inspire future developments.