Company Filing History:
Years Active: 2016-2019
Title: The Innovations of Ramkumar Subramanian
Introduction
Ramkumar Subramanian is a notable inventor based in Fremont, CA. He has made significant contributions to the field of technology, particularly in the area of semiconductor processing. With a total of 4 patents to his name, Subramanian continues to push the boundaries of innovation.
Latest Patents
One of his latest patents is titled "Method of tungsten etching." This patent describes a method for etching a tungsten-containing layer in an etch chamber. The process involves placing a substrate with a tungsten-containing layer in the chamber and executing a series of cycles. Each cycle consists of a passivation phase, which forms a passivation layer on the sidewalls and bottoms of features in the tungsten layer, followed by an etch phase that etches the features in the tungsten layer.
Another significant patent is "System and method for detecting a process point in multi-mode pulse processes." This invention outlines a system for identifying a selected process point in a multi-mode pulsing process. It includes applying a multi-mode pulsing process to a selected wafer in a plasma process chamber. The process consists of multiple cycles, each containing different phases. By collecting process output variables during these cycles, the system can identify the selected process point through comparative analysis.
Career Highlights
Ramkumar Subramanian is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on advancing technologies that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Throughout his career, Subramanian has collaborated with talented individuals such as Yoko Yamaguchi and Yassine Kabouzi. These collaborations have contributed to the development of innovative solutions in the field.
Conclusion
Ramkumar Subramanian's contributions to the field of semiconductor processing through his patents and collaborations highlight his role as a key innovator. His work continues to influence the industry and pave the way for future advancements.