Location History:
- Kesseldorf, DE (2004)
- Kesselsdorf, DE (2005 - 2008)
Company Filing History:
Years Active: 2004-2008
Title: Ralf Otto: Innovator in Semiconductor Technology
Introduction
Ralf Otto is a notable inventor based in Kesselsdorf, Germany. He has made significant contributions to the field of semiconductor technology, holding three patents that showcase his innovative spirit and technical expertise.
Latest Patents
One of Ralf Otto's latest patents is a method for determining the end point for a cleaning etching process. This method effectively and reliably determines the end point during the cleaning etching of processing chambers by means of plasma etching. The invention monitors the DC bias voltage on the plasma generator, which is crucial for the plasma cleaning etching process. The process is terminated by stopping the supply of process gases and switching off the plasma generator upon reaching a predetermined DC bias voltage value, indicating the completion of the cleaning etching process.
Another significant patent involves a method for exposing at least one or two semiconductor wafers. In this process, a batch of semiconductor wafers is exposed after alignment in a wafer stepper or scanner. The alignment parameters are determined, and the overlay accuracy can be calculated in advance with high precision. This innovation allows for adjustments to the exposure tool-offset on a wafer-to-wafer basis, reducing the required inspection tool capacity and decreasing wafer rework, ultimately saving time during the exposure step.
Career Highlights
Ralf Otto is currently employed at Infineon Technologies AG, a leading company in semiconductor solutions. His work at Infineon has allowed him to apply his innovative ideas and contribute to advancements in semiconductor manufacturing processes.
Collaborations
Ralf has collaborated with notable coworkers such as Thorsten Schedel and Thomas Fischer. Their teamwork has fostered an environment of innovation and has led to the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Ralf Otto's contributions to semiconductor technology through his patents and work at Infineon Technologies AG highlight his role as a key innovator in the field. His inventions not only enhance manufacturing processes but also pave the way for future advancements in semiconductor technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.