Company Filing History:
Years Active: 2021
Title: **Rajitha Vemuri: Innovator in Plasma Technology from Tempe, AZ**
Introduction
Rajitha Vemuri is an accomplished inventor based in Tempe, Arizona. With a strong focus on innovations in plasma technology, Vemuri has developed a patented method that enhances the efficiency of substrate support structures in various applications.
Latest Patents
Vemuri holds one patent titled "Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure." This innovative method involves positioning an insulator-type substrate on a support surface while exposed to plasma. An initial clamping voltage is applied to quickly accumulate electrical charge on the support surface to securely hold the substrate. The process includes flowing a backside cooling gas and monitoring its leak rate to maintain optimal conditions. The method features both steady and pulsed clamping voltages to ensure the leak rate remains below a maximum allowable threshold, showcasing Vemuri's commitment to integrating precision and efficiency in technology.
Career Highlights
Vemuri is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His role involves working on advanced technologies that contribute to innovation in substrate handling and processing. His contributions to the field demonstrate how inventors can significantly impact the industry's evolution through dedicated research and development.
Collaborations
During his career, Rajitha Vemuri has collaborated with esteemed colleagues, including Chin-Yi Liu and Daniel Lai. These partnerships highlight the collaborative spirit inherent in research and development, emphasizing the importance of teamwork in driving innovation forward.
Conclusion
Rajitha Vemuri exemplifies the innovative spirit characteristic of today's inventors. His patent, focused on enhancing substrate support structures in plasma technology, signifies a meaningful advancement in the field. As he continues his work at Lam Research Corporation, Vemuri remains poised to contribute further to technological progress and innovation.