Rajesh Dorai

Title: Innovations by Inventor Rajesh Dorai

Introduction

Rajesh Dorai is a prominent inventor based in Fremont, CA, known for his contributions to the field of semiconductor processing. With a focus on enhancing the efficiency and effectiveness of gas distribution in semiconductor tools, he has made significant strides in innovation. Currently, he holds two patents that reflect his expertise and commitment to advancing technology.

Latest Patents

Dorai's latest inventions include:

1. **Showerhead Faceplates with Angled Gas Distribution Passages for Semiconductor Processing Tools**: This patent outlines the design of showerhead faceplates that incorporate gas distribution passages extending at oblique angles to the center axis. This innovative design allows for tailored gas flow characteristics, enabling various gas flow behaviors crucial for the effective delivery of gas to wafers during semiconductor manufacturing processes.

2. **Edge Ring Assembly for Improving Feature Profile Tilting at Extreme Edge of Wafer**: The second patent describes an advanced edge ring assembly that comprises an upper edge ring surrounding an electrostatic chuck and a lower inner edge ring made of conductive material, isolated from the chuck. This setup is designed to enhance the quality of semiconductor wafers by improving feature profile tilting, which is critical at the extreme edges of the wafer.

Career Highlights

Rajesh Dorai has made notable contributions while working with Lam Research Corporation, a leader in semiconductor equipment. His role as an inventor in this global company highlights his impact on the industry, particularly in developing solutions that improve semiconductor processing technologies.

Collaborations

Throughout his career, Dorai has collaborated with notable professionals, including William Frederick Bosch and Tamarak Pandhumsoporn. These collaborations have fostered a dynamic environment for innovation and have contributed to the successful development of his patents.

Conclusion

In summary, Rajesh Dorai's inventive contributions to semiconductor processing demonstrate his commitment to technology and innovation. His patents not only enhance manufacturing processes but also reflect his collaborative spirit and dedication to advancing the industry. As he continues to work with experts in the field, the potential for further innovations in semiconductor technology remains promising.