Rajeev Rajendran

Title: The Innovations of Rajeev Rajendran

Introduction

Rajeev Rajendran is a notable inventor based in San Francisco, CA. He has made significant contributions to the field of extreme ultraviolet (EUV) technology. His work focuses on enhancing the capabilities of EUV tools, which are essential in the semiconductor manufacturing process.

Latest Patents

Rajeev holds a patent for "In-situ in-band and out-of-band spectral measurement for EUV tools." This innovative patent describes a system where a substrate is mounted on a chuck within a chamber of an EUV tool. An illumination aperture in the chamber provides a beam of light that illuminates the substrate. This beam includes extreme ultraviolet (EUV) in-band (IB) light and out-of-band (OOB) light, with the latter having longer wavelengths than the EUV IB light. The system features a beam-narrowing aperture that selectively narrows the beam of light to illuminate the substrate. A band-selection filter is employed to filter out either the OOB light or the EUV IB light. The imaging optics in the chamber relay light from the substrate to an imaging plane, while a grating spectrally disperses the light. A sensor detects the light from the substrate, which is relayed by the imaging optics and spectrally dispersed by the grating. Rajeev has 1 patent to his name.

Career Highlights

Rajeev is currently employed at Kla Corporation, a leading company in the semiconductor equipment industry. His work at Kla Corporation has positioned him as a key player in advancing EUV technology. His innovative approaches have contributed to the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Rajeev collaborates with talented individuals in his field, including Michael Xie and Farid Atry. These collaborations enhance the innovative environment at Kla Corporation and contribute to the development of cutting-edge technologies.

Conclusion

Rajeev Rajendran is a prominent inventor whose work in EUV technology has made a significant impact on the semiconductor industry. His patent and contributions to Kla Corporation highlight his role in advancing technological innovations.