Company Filing History:
Years Active: 1981-1994
Title: R Howard Shaw: Innovator in Semiconductor Technology
Introduction
R Howard Shaw is a notable inventor based in Palo Alto, California, recognized for his contributions to semiconductor technology. With a total of nine patents to his name, Shaw has made significant advancements in the field of wafer coating systems.
Latest Patents
One of Shaw's latest patents involves a wafer coating system designed for semiconductor wafers that have intricate patterns of steps and grooves defining microcircuit elements. This innovative system supports the wafers individually adjacent to a ring-shaped sputtering source, ensuring a stationary relationship during the coating process. The vacuum chamber sputter coating apparatus includes multiple workstations, with at least one featuring the ring-shaped sputtering source. Additionally, it incorporates a load lock and an intermittently rotating vertical plate-like wafer carrier that transports wafers from the load lock to the workstations. The carrier is designed to hold the wafers in an upright position, allowing both surfaces to be accessed by processing equipment, such as heating or cooling means. This design minimizes the risk of contamination and disturbances within the chamber environment.
Career Highlights
Throughout his career, R Howard Shaw has worked with prominent companies, including Varian Associates, Inc. and General Electric Company. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.
Collaborations
Shaw has collaborated with notable individuals in the field, including Martin A Hutchinson and George L Coad. These partnerships have likely enhanced his work and contributed to the development of his patented technologies.
Conclusion
R Howard Shaw's contributions to semiconductor technology through his innovative patents and collaborations highlight his significant role in advancing the industry. His work continues to influence the field of microcircuit manufacturing and wafer processing.