The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 1988
Filed:
Feb. 12, 1988
Applicant:
Inventor:
R Howard Shaw, Palo Alto, CA (US);
Assignee:
Varian Associates, Inc., Palo Alto, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23B / ;
U.S. Cl.
CPC ...
279-4 ; 118503 ; 2692 / ; 279106 ;
Abstract
An assembly is provided for supporting semiconductor wafers individually within a support while permitting processing of both faces of a wafer as well as facilitating rapid insertion and removal of wafers into the support. Each assembly includes a wire clip having an arcuate tip used to grasp the wafer. The wire clip can be moved in two planes by actuating mechanisms, thereby moving the clip out of the plane of wafer processing and facilitating loading in the wafer processing plane.