Location History:
- Union City, CA (US) (2000 - 2001)
- Sunnyvale, CA (US) (2003 - 2010)
Company Filing History:
Years Active: 2000-2010
Title: Quyen Pham: Innovator in Wafer Measurement Technology
Introduction
Quyen Pham is a notable inventor based in Sunnyvale, California. She has made significant contributions to the field of wafer measurement technology. With a total of 6 patents to her name, her work has advanced the methods used in the semiconductor industry.
Latest Patents
Quyen's latest patents include a "Method and apparatus for measuring a thickness of a layer of a wafer." This invention provides a sophisticated apparatus that utilizes an eddy current sensor with first and second sensor heads. The sensor heads are strategically positioned to allow a test object to pass through a predetermined gap. As the test object moves, the sensor heads take measurements at specific sampling locations. The apparatus also features a position sensing mechanism to accurately determine these locations, along with an evaluation circuit that communicates with the sensor to ascertain the thickness of the test object.
Another significant patent is the "Apparatus and method of dynamically measuring thickness of a layer of a substrate." Similar to her previous invention, this apparatus employs an eddy current sensor and is designed to measure the thickness of a test object as it moves through the gap between the sensor heads. This innovation further enhances the precision of thickness measurements in various applications.
Career Highlights
Quyen Pham is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. Her work at Applied Materials has positioned her as a key player in the development of advanced measurement technologies.
Collaborations
Quyen has collaborated with notable colleagues, including Kenneth Tsai and Lawrence C. Lei. These collaborations have contributed to her innovative work and the successful development of her patents.
Conclusion
Quyen Pham's contributions to wafer measurement technology exemplify her dedication to innovation in the semiconductor field. Her patents reflect her expertise and commitment to advancing measurement techniques, making her a significant figure in her industry.