The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2003
Filed:
Mar. 31, 2000
Applicant:
Inventors:
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 3/300 ;
U.S. Cl.
CPC ...
G01N 3/300 ;
Abstract
An effluent monitoring apparatus comprising an energizing cell adapted to receive an effluent, a gas energizer that is capable of energizing the effluent in the cell thereby emitting a radiation, a radiation permeable window that is spaced apart from the wall of the cell by a distance d that is sufficiently high to reduce a deposition of effluent residue from the energized gas on the window , and a detector to detect the radiation.