Quek Kiok Elgin

Title: The Innovative Contributions of Quek Kiok Elgin

Introduction

Quek Kiok Elgin is a notable inventor based in Singapore, recognized for his significant contributions to the field of integrated circuit technology. His innovative work has led to the development of a unique patent that addresses critical challenges in semiconductor manufacturing.

Latest Patents

Quek Kiok Elgin holds a patent for a "Locos mask for suppression of narrow space field oxide thinning." This invention presents a novel design of an oxidation mask that enhances control over the birds beak phenomenon, particularly in the context of tailoring and smoothing the field oxide isolation profile. The mask is especially beneficial for narrow field isolation spacings found in sub half-micron integrated circuit technology. It incorporates a thin tapered silicon nitride foot along its lower edge, which allows for nominal expansion of the oxide during the early stages of oxidation. This design facilitates in-situ stress relief and smooths the oxide profile. The taper of the foot provides a gradual increase in mask stiffness as oxidation progresses, allowing for flexibility during the initial rapid growth phase, followed by increased stiffness in later stages to inhibit birds beak penetration. This innovative approach reduces shear stresses responsible for dislocation generation by as much as fifty-fold, resulting in improved surface topography and suppression of oxide punchthrough and narrow oxide thinning effects.

Career Highlights

Quek Kiok Elgin is associated with Chartered Semiconductor Manufacturing Ltd, where he has made significant strides in semiconductor technology. His work has been instrumental in advancing the capabilities of integrated circuits, particularly in the area of field oxide isolation.

Collaborations

Throughout his career, Quek has collaborated with esteemed colleagues such as Igor V Peidous and Konstantin V Loiko. These collaborations have further enriched his contributions to the field and fostered innovation within the industry.

Conclusion

Quek Kiok Elgin's inventive spirit and dedication to improving semiconductor technology have made a lasting impact on the industry. His patent for the Locos mask exemplifies his commitment to innovation and excellence in the field of integrated circuits.