Qu Jin

Title: Qu Jin: Innovator in Semiconductor Processing

Introduction

Qu Jin is a notable inventor based in Chandler, AZ (US). He has made significant contributions to the field of semiconductor processing. His innovative work focuses on improving methods and apparatus for precleaning semiconductor substrates.

Latest Patents

Qu Jin holds a patent for "Semiconductor processing preclean methods and apparatus." This patent describes a method for semiconductor processing preclean that involves removing an oxide layer from a substrate using anhydrous hydrogen fluoride in combination with water vapor. The system designed for this precleaning process is configured to separate the anhydrous hydrogen fluoride and the water vapor until they are delivered to a common volume near the substrate. To limit corrosion within the components of the system, various strategies are employed, including the purification of anhydrous hydrogen fluoride, passivation of components, changing component materials, and heating components. Passivation is achieved by filling a gas delivery component with anhydrous hydrogen fluoride and allowing it to remain in the component to form a protective layer. Consistent delivery of water vapor is facilitated by heating components using heaters.

Career Highlights

Qu Jin's career is marked by his dedication to advancing semiconductor technology. His innovative approaches have led to the development of effective precleaning methods that enhance the efficiency and reliability of semiconductor manufacturing processes. His work is crucial in ensuring the quality of semiconductor devices.

Collaborations

Qu Jin collaborates with talented professionals in his field, including Chuang Wei and Aditya Chaudhury. These collaborations foster an environment of innovation and contribute to the advancement of semiconductor processing technologies.

Conclusion

Qu Jin is a prominent inventor whose work in semiconductor processing has made a significant impact on the industry. His innovative methods and collaborative efforts continue to drive advancements in technology.