Qingsong Wei

Title: Innovations of Qingsong Wei in Semiconductor Fabrication

Introduction

Qingsong Wei is a prominent inventor based in Beijing, China. He has made significant contributions to the field of semiconductor fabrication, holding a total of 2 patents. His work focuses on innovative methods that enhance the efficiency and effectiveness of semiconductor devices.

Latest Patents

Qingsong Wei's latest patents include a method of fabricating semiconductor devices that feature PMOS devices with embedded SiGe. This method involves forming a recess with a rectangular cross-section in a substrate, followed by the creation of oxide layers on the sidewalls and bottom of the recess through an oxygen ion implantation process. The oxide layer on the sidewalls is intentionally made thinner than that on the bottom. The process continues with the complete removal of the sidewall oxide layer, leaving a portion of the bottom oxide layer intact. The sidewalls are then shaped into a specific form using orientation selective wet etching, with the remaining oxide layer serving as a stop layer. This innovative approach prevents the formation of a cuspate bottom in the recess.

Another patent by Qingsong Wei details a method for fabricating semiconductor devices that also begins with forming a recess of rectangular section. An oxide layer is formed on both the sidewalls and the bottom of the recess through anisotropic oxidation. Similar to his previous patent, the sidewall oxide layer is thinner, and the method includes the complete removal of the sidewall oxide layer and partial removal of the bottom oxide layer. The process culminates in orientation selective wet etching, shaping the sidewalls into a specific section, followed by the removal of the remaining oxide layer using isotropic wet etching.

Career Highlights

Qingsong Wei is currently employed at Semiconductor Manufacturing International Corporation in Beijing. His work at this leading semiconductor company has allowed him to apply his innovative methods in a practical setting, contributing to advancements in semiconductor technology.

Collaborations

Qingsong Wei has collaborated with notable colleagues, including Yonggen He and Wei Lu. Their combined expertise in semiconductor fabrication has fostered an environment of innovation and progress within their field.

Conclusion

Qingsong Wei's contributions to semiconductor fabrication through his innovative patents demonstrate his significant impact on the industry. His methods not only enhance the efficiency of semiconductor devices but also pave the way for future advancements in technology.