Qiang Ma

Title: Qiang Ma: Innovator in Semiconductor Processing Systems

Introduction

Qiang Ma is a prominent inventor based in Cupertino, CA, known for his contributions to semiconductor processing systems. With a total of 3 patents, he has made significant advancements in the field, particularly in enhancing the efficiency and functionality of semiconductor manufacturing processes.

Latest Patents

One of Qiang Ma's latest patents is titled "Switchable delivery for semiconductor processing system." This invention involves exemplary semiconductor processing systems that include a processing chamber with a lid stack and an output manifold. The system features a gas panel and an input manifold that fluidly couples the gas panel with the output manifold. A delivery line extends from the input manifold to the output manifold, with a first transmission line connecting a first set of precursor sources to the delivery line. Additionally, a second transmission line is switchably coupled between the delivery line and the exhaust of the semiconductor processing system.

Another notable patent is "System and method for substrate processing chambers." This invention focuses on systems and methods for depositing a film in a PECVD chamber while minimizing residue buildup. The processing chamber includes a chamber body, a substrate support, a showerhead, and heaters designed to heat the showerhead. In some embodiments, the processing chamber is equipped with a controller to enhance its operational capabilities.

Career Highlights

Qiang Ma is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has allowed him to develop innovative solutions that address critical challenges in semiconductor processing.

Collaborations

Throughout his career, Qiang Ma has collaborated with notable colleagues, including Shailendra Srivastava and Zhijun Jiang. These collaborations have contributed to the advancement of technologies in the semiconductor field.

Conclusion

Qiang Ma's contributions to semiconductor processing systems through his patents and work at Applied Materials, Inc. highlight his role as an influential inventor in the industry. His innovative solutions continue to shape the future of semiconductor manufacturing.