This inventor holds 1 USPTO granted patent. Top assignee: Kla Tencor Corporation. Active years: 2020.
Company Filing History:
Years Active: 2020
Title: Innovations of Qi Dai in Semiconductor Measurement Technologies
Introduction
Qi Dai is an accomplished inventor based in San Jose, CA. He has made significant contributions to the field of semiconductor measurement technologies. His innovative work focuses on the detection and measurement of dimensions of asymmetric structures, which is crucial for advancing semiconductor manufacturing processes.
Latest Patents
Qi Dai holds a patent for "Detection and measurement of dimensions of asymmetric structures." This patent presents methods and systems for performing spectroscopic measurements of asymmetric features of semiconductor structures. In one aspect, measurements are performed at two or more azimuth angles to ensure sensitivity to an arbitrarily oriented asymmetric feature. Spectra associated with one or more off-diagonal Mueller matrix elements sensitive to asymmetry are integrated over wavelength to determine one or more spectral response metrics. In some embodiments, the integration is performed over one or more wavelength sub-regions selected to increase the signal-to-noise ratio. Values of parameters characterizing an asymmetric feature are determined based on the spectral response metrics and critical dimension parameters measured by traditional spectral matching-based techniques. Qi Dai has 1 patent to his name.
Career Highlights
Qi Dai is currently employed at KLA-Tencor Corporation, a leading company in the semiconductor industry. His work at KLA-Tencor involves developing advanced measurement technologies that enhance the precision and efficiency of semiconductor manufacturing.
Collaborations
Qi Dai has collaborated with notable colleagues, including Phillip Atkins and Liequan Lee. These collaborations have contributed to the advancement of innovative solutions in semiconductor measurement.
Conclusion
Qi Dai's contributions to semiconductor measurement technologies exemplify the importance of innovation in the field. His patent and work at KLA-Tencor Corporation highlight his role in advancing the industry.