Company Filing History:
Years Active: 2007
Title: Innovations in Lithography: The Patented Work of Plash P Das
Introduction: Plash P Das is an esteemed inventor based in Vista, CA, who has made significant contributions to the field of laser technology. His innovative work has led to the development of a cutting-edge laser system that enhances performance in lithography machines. With one patented invention to his name, Plash has demonstrated exceptional ingenuity in creating solutions for advanced manufacturing processes.
Latest Patents: Plash P Das holds a patent for a "Lithography laser with beam delivery and beam pointing control." This invention features a modular high repetition rate ultraviolet gas discharge laser light source specifically designed for production line machines. The system incorporates an enclosed and purged beam path that allows for precise beam pointing control, ensuring that the laser beam is directed accurately to locations such as the entrance port of a lithography machine. Notably, the invention employs a master oscillator producing a very narrow band seed beam amplified in a second discharge chamber, resulting in output pulse energies that can reach approximately double that of comparable single chamber laser systems, along with improved beam quality.
Career Highlights: Throughout his career at Cymer, Inc., Plash P Das has demonstrated an unwavering commitment to innovation and excellence. His work on the laser system not only improves illumination consistency throughout the lithography system's operational life but also addresses the performance degradation commonly seen in optical components. This invention not only proves beneficial for lithography applications but also sets a new standard in laser technology.
Collaborations: Plash has collaborated with notable professionals in the field, including R Kyle Webb and Marco Giovanardi. These partnerships have fostered a dynamic environment for creative problem-solving and advancements in technology. Working alongside talented colleagues has enabled Plash to refine his inventions and contribute further to the industry.
Conclusion: The achievements of Plash P Das reflect a deep understanding of laser technology and its applications in modern manufacturing. His patent for the lithography laser with beam delivery and beam pointing control represents a significant leap forward in the field, illustrating how innovation can lead to enhanced efficiency and quality in production processes. Through his work at Cymer, Inc., he continues to inspire future advancements in laser technology and related fields.