Petros Miltiades Kopalidis

Title: The Innovative Contributions of Petros Miltiades Kopalidis

Introduction

Petros Miltiades Kopalidis is a notable inventor based in Swampscott, MA (US). He has made significant contributions to the field of thermal management in semiconductor manufacturing. His innovative approach has led to the development of a unique patent that enhances the efficiency of ion implantation systems.

Latest Patents

Kopalidis holds a patent for an invention titled "In-situ wafer temperature measurement and control." This invention features a thermal chuck that selectively retains a workpiece on a clamping surface. The thermal chuck is equipped with one or more heaters that can selectively heat the clamping surface and the workpiece. A thermal monitoring device is employed to determine the temperature of the workpiece's surface while it resides on the clamping surface, defining one or more measured temperatures. The controller selectively energizes the heaters based on these measured temperatures. The thermal monitoring device may include a thermocouple or RTD in contact with the workpiece surface, as well as an emissivity sensor or pyrometer that does not contact the surface. This thermal chuck can be integrated into an ion implantation system designed to implant ions into the workpiece, with the controller further configured to manage the heaters based on the measured temperatures. Kopalidis has 1 patent to his name.

Career Highlights

Petros Miltiades Kopalidis is currently employed at Axcelis Technologies, Inc., where he continues to innovate in the field of semiconductor technology. His work focuses on improving the precision and efficiency of thermal management systems, which are critical in the manufacturing of semiconductor devices.

Collaborations

Throughout his career, Kopalidis has collaborated with esteemed colleagues, including John F Baggett and Ronald N Reece. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Petros Miltiades Kopalidis is a distinguished inventor whose work in thermal management has made a significant impact on semiconductor manufacturing. His patent for in-situ wafer temperature measurement and control exemplifies his commitment to advancing technology in this field.