Peter R Hagerty

Title: The Innovations of Peter R Hagerty

Introduction

Peter R Hagerty is a notable inventor based in Mansfield, MA (US). He has made significant contributions to the field of photoresist compositions, holding a total of 2 patents. His work has advanced the technology used in various applications, particularly in the semiconductor industry.

Latest Patents

Hagerty's latest patents focus on chemically amplified positive photoresists. These photoresist compositions comprise a resin binder with photoacid-labile groups, an acid generator, and a photospeed control agent. The photoresists developed by Hagerty exhibit excellent photospeed and can produce highly resolved relief images of small dimensions. This includes lines of sub-micron and sub-half micron dimensions with nearly vertical side walls. Additionally, methods are provided that allow for the control of photospeed in these photoresist compositions.

Career Highlights

Throughout his career, Peter R Hagerty has worked with various companies, including Shipley Company LLC. His expertise in photoresist technology has positioned him as a key figure in the industry, contributing to advancements that benefit numerous applications.

Collaborations

Hagerty has collaborated with notable individuals in his field, including James W Thackeray and James F Cameron. These collaborations have further enriched his work and expanded the impact of his innovations.

Conclusion

Peter R Hagerty's contributions to the field of photoresist technology demonstrate his commitment to innovation and excellence. His patents and collaborations reflect a career dedicated to advancing the capabilities of photoresist compositions.