The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2001
Filed:
Aug. 04, 1998
Applicant:
Inventors:
James W. Thackeray, Braintree, MA (US);
Peter R. Hagerty, Mansfield, MA (US);
James F. Cameron, Boston, MA (US);
Wu-Song Huang, Poughkeepsie, NY (US);
Ahmad D. Katnani, Poughkeepsie, NY (US);
Willard E. Conley, San Jose, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 ; G03F 7/30 ;
U.S. Cl.
CPC ...
G03F 7/004 ; G03F 7/30 ;
Abstract
Photoresist compositions are provided comprising 1) a resin binder having photoacid-labile groups, 2) an acid generator and 3) a photospeed control agent. Photoresists of the invention exhibit good photospeed and can provide highly resolved relief images of small dimensions, including lines of sub-micron and sub-half micron dimensions with at least essentially vertical side walls. Methods are also provided that include control of photospeed of a photoresist composition of the invention.