Peter Michael Banks

Title: Innovations of Peter Michael Banks

Introduction

Peter Michael Banks is a notable inventor based in West Sussex, GB. He has made significant contributions to the field of ion implantation technology, holding a total of 7 patents. His work focuses on improving the precision and efficiency of ion implanters, which are crucial in various applications, including semiconductor manufacturing.

Latest Patents

One of his latest patents is a method of implanting a substrate and an ion implanter for performing the method. This invention provides two-dimensional scanning of a substrate relative to an implant beam, allowing the beam to draw a raster of scan lines on the substrate. The beam current is measured at turnaround points off the substrate, and this current value is used to control the subsequent fast scan speed, compensating for any variation in beam current on dose uniformity in the slow scan direction. The scanning may produce a raster of non-intersecting uniformly spaced parallel scan lines, ensuring appropriate dose uniformity.

Another significant patent relates to ion sources. This invention addresses methods of controlling the effect of ions from an ionizable source gas that can react with the interior surfaces of an arc chamber. By introducing ions of a displacement gas into the arc chamber, which are more chemically reactive with the material of the interior surfaces than the ions of the source gas, the invention enhances the performance and longevity of the ion implanter.

Career Highlights

Peter Michael Banks is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at this organization has allowed him to further develop his innovative ideas and contribute to advancements in ion implantation technology.

Collaborations

Throughout his career, Banks has collaborated with notable colleagues, including Adrian John Murrell and Peter T Kindersley. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies in the field.

Conclusion

Peter Michael Banks is a distinguished inventor whose work in ion implantation technology has made a significant impact on the industry. His innovative patents and collaborations continue to drive advancements in this critical field.