The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2004
Filed:
Nov. 07, 2003
Applicant:
Inventors:
Adrian Murrell, Horsham, GB;
Peter Michael Banks, Horsham, GB;
Andrew Allen, Horsham, GB;
Neil L. Clarke, Brighton, GB;
Matthew Peter Dobson, Brighton, GB;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 4/910 ; H01J 3/7317 ;
U.S. Cl.
CPC ...
H01J 4/910 ; H01J 3/7317 ;
Abstract
The invention relates to an ion source for an ion implanter in which source material for providing desired ions is provided in the form of a plate or liner which can be fitted into the reactant chamber of the ion source.