Peter Hing

Title: Innovations by Inventor Peter Hing

Introduction

Peter Hing is a notable inventor based in Singapore, SG. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on methods that enhance the efficiency and effectiveness of shallow trench isolation in semiconductor substrates.

Latest Patents

One of Peter Hing's latest patents is a method to achieve shallow trench isolation (STI) planarization. This innovative approach describes a new method of forming shallow trench isolations without the use of chemical mechanical polishing (CMP). The process involves etching a plurality of isolation trenches through an etch stop layer into the semiconductor substrate, leaving narrow and wide active areas between the trenches. An oxide layer is then deposited over the etch stop layer and within the trenches using a high-density plasma chemical vapor deposition process (HDP-CVD). This method allows for precise control over the oxide layer's depth, ensuring optimal performance in semiconductor applications.

Another significant patent by Hing is focused on shallow trench isolation elevation uniformity via the insertion of a polysilicon etch layer. This process utilizes a disposable polysilicon stop layer to achieve uniform insulator fill, independent of shallow trench width. The method includes filling shallow trench shapes with a first HDP-deposited silicon oxide layer, followed by the deposition of a thin polysilicon stop layer and a second HDP silicon oxide layer. This innovative approach enhances the reliability and efficiency of semiconductor manufacturing processes.

Career Highlights

Peter Hing is currently employed at Chartered Semiconductor Manufacturing Ltd, where he continues to develop groundbreaking technologies in the semiconductor industry. His expertise and innovative mindset have positioned him as a key player in advancing semiconductor manufacturing techniques.

Collaborations

Peter has collaborated with notable coworkers, including Chen Feng and Alex See, who have contributed to his research and development efforts in the field.

Conclusion

Peter Hing's contributions to semiconductor technology through his patents and innovative methods have significantly impacted the industry. His work continues to pave the way for advancements in semiconductor manufacturing processes.