Peter Harold Buckley

Title: Innovations by Peter Harold Buckley

Introduction

Peter Harold Buckley is an accomplished inventor based in Salem, NH (US). He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on enhancing cleaning processes and gas handling in semiconductor manufacturing.

Latest Patents

One of Buckley's latest patents is titled "Thermal activation of fluorine for use in a semiconductor chamber." This patent describes a method and system for thermally activating an oxidizing cleaning gas used in semiconductor process chamber cleaning. The process involves reacting the oxidizing cleaning gas with heated inert gas, resulting in a thermally activated oxidizing cleaning gas that does not readily deactivate, thus providing enhanced cleaning capabilities.

Another notable patent is for a "Valve for use with high purity gas." This invention features a valve body that defines a valve chamber with a valve outlet for gas discharge. The design includes a reciprocable sealing member that operates along an axis parallel to the gas flow direction. This valve is characterized by a low wetted area, making it easy to purge, and its design reduces wear, allowing for easy replacement of components when necessary.

Career Highlights

Peter Harold Buckley is currently employed at The BOC Group, Inc., where he continues to innovate in the field of gas technologies. His work has been instrumental in improving the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Throughout his career, Buckley has collaborated with notable colleagues, including Richard A. Hogle and Noel James Leeson. These partnerships have contributed to the advancement of technologies in their respective fields.

Conclusion

Peter Harold Buckley is a prominent inventor whose work in semiconductor technology has led to significant advancements. His patents reflect a commitment to innovation and improvement in manufacturing processes.