Company Filing History:
Years Active: 2003-2004
Title: The Innovations of Peter Hübler
Introduction
Peter Hübler is a notable inventor based in Coswig, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing the reliability and performance of semiconductor devices.
Latest Patents
One of Hübler's latest patents is titled "Semiconductor device with a copper line having an increased resistance against electromigration and a method of forming the same." This invention involves a copper line formed in a patterned dielectric layer, which has a copper/silicon film applied to its surface to suppress electromigration paths. The process includes cleaning the exposed copper surface using a reactive plasma ambient and subsequently adding a gaseous compound comprising silicon to form the copper/silicon film. Additionally, a capping layer may be deposited, allowing for various deposition techniques to be utilized.
Another significant patent is "Interface void monitoring in a damascene process." This method aims to determine the quality of interconnections in integrated circuits, particularly in damascene applications. It involves depositing a barrier metal layer directly on a planarized metal surface, which allows for large-area surface analysis without destroying the interface for further examination. This analysis can be conducted using an electron microscope in back-scatter mode.
Career Highlights
Peter Hübler is currently employed at Advanced Micro Devices Corporation, a leading company in the semiconductor industry. His work at AMD has allowed him to contribute to cutting-edge technologies that enhance the performance and reliability of electronic devices.
Collaborations
Hübler has collaborated with several talented individuals in his field, including Volker Kahlert and Frank Koschinsky. These collaborations have fostered innovation and have led to advancements in semiconductor technology.
Conclusion
Peter Hübler's contributions to semiconductor technology through his patents and work at Advanced Micro Devices Corporation highlight his role as a significant inventor in the industry. His innovative approaches continue to influence the development of reliable and efficient electronic devices.