Location History:
- Westford, VT (US) (2003 - 2013)
- Essex Junction, VT (US) (2021)
Company Filing History:
Years Active: 2003-2021
Title: The Innovations of Peter H Bartlau
Introduction
Peter H Bartlau is a notable inventor based in Essex Junction, Vermont, who has made significant contributions to the field of photolithography. With a total of three patents to his name, Bartlau's work focuses on enhancing the durability and functionality of photomasks used in the fabrication of integrated circuits.
Latest Patents
One of Bartlau's latest patents is titled "Protection of photomasks from 193nm radiation damage using thin coatings of ALD Al2O3." This invention relates to a method used in a photolithographic process, which involves depositing a film of Atomic Layered Deposition (ALD) Al2O3 on a photomask. The process includes subjecting the film to plasma treatment and subsequently irradiating it at a wavelength of 193 nm. Another significant patent is "Techniques for reducing degradation and/or modifying feature size of photomasks." This patent describes a photomask that includes a light-transmitting substrate and an absorber layer made of silicide, such as molybdenum silicide, patterned into various features. The invention emphasizes controlling the surrounding environment to prevent undesirable oxidation while encouraging desirable growth during exposure to light.
Career Highlights
Peter H Bartlau is currently employed at International Business Machines Corporation (IBM), where he continues to innovate and develop new technologies in the field of photolithography. His work has been instrumental in advancing the capabilities of photomasks, which are critical components in the manufacturing of integrated circuits.
Collaborations
Throughout his career, Bartlau has collaborated with several esteemed colleagues, including Thomas Benjamin Faure and Alfred Wagner. These collaborations have contributed to the development of innovative solutions in the field.
Conclusion
Peter H Bartlau's contributions to the field of photolithography through his patents and work at IBM highlight his role as a significant inventor. His innovative approaches to protecting photomasks and enhancing their functionality continue to impact the industry positively.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.