Peter E Maciejowski

Title: Innovations by Peter E. Maciejowski

Introduction

Peter E. Maciejowski is a notable inventor based in Amesbury, MA (US). He has made significant contributions to the field of ion sources and particle accelerators. With a total of 2 patents, his work has advanced the technology used in semiconductor equipment.

Latest Patents

One of his latest patents is for an indirectly heated cathode ion source. This invention includes an arc chamber housing that defines an arc chamber, an indirectly heated cathode, and a filament for heating the cathode. The cathode features an emitting portion with a front surface, a rear surface, and a periphery. Additionally, a support rod is attached to the rear surface of the emitting portion, and a skirt extends from the periphery of the emitting portion. The cathode assembly comprises the cathode, a filament, and a clamp assembly that maintains a fixed spatial relationship while conducting electrical energy to both the cathode and the filament. The filament is strategically positioned in a cavity defined by the emitting portion and the skirt of the cathode. Furthermore, the ion source may include a shield to inhibit the escape of electrons and plasma from the arc chamber's proximity to the filament and the cathode.

Another significant patent involves methods and apparatus for operating a high-energy accelerator in low-energy mode. This invention provides efficient operation of an ion implanter that includes a charged particle accelerator. The accelerator operates in both high-energy and low-energy modes. In low-energy mode, the high voltage power supply is disabled from energizing the accelerator column. The switching assembly features elements that connect the accelerator electrodes to a reference potential in low-energy mode while isolating them in high-energy mode. This design minimizes space charge expansion of the beam when transporting positive ion beams in low-energy mode.

Career Highlights

Peter E. Maciejowski is currently employed at Varian Semiconductor Equipment Associates, Inc. His work at this company has allowed him to focus on developing advanced technologies in the semiconductor industry.

Collaborations

He has collaborated with notable coworkers such as Bjorn O. Pedersen and Joseph C. Olson. Their combined expertise has contributed to the success of various projects within the company.

Conclusion

Peter E. Maciejowski's innovations in ion sources and particle accelerators have made a significant impact on the semiconductor industry. His