Company Filing History:
2 out of 3,371 
1 out of 832,718 Years Active: 1996-2006
Title: Innovations by Peter D Washabaugh
Introduction
Peter D Washabaugh is a notable inventor based in Ann Arbor, MI (US). He has made significant contributions to the field of microelectromechanical systems (MEMS) and holds a total of 3 patents. His work focuses on developing advanced technologies that enhance the functionality and efficiency of microfluidic systems.
Latest Patents
One of his latest patents is for a micropump assembly designed for microgas chromatographs and similar applications. This MEMS-fabricated microvacuum pump assembly operates efficiently in air and can be seamlessly integrated into MEMS-fabricated microfluidic systems. The design features a series of pumping cavities with electrostatically-actuated membranes, interconnected by microvalves. The innovative large deflection electrostatic actuator utilizes a curved fixed drive electrode and a flat movable polymer electrode, allowing for greater travel distances at lower voltages. Another significant patent involves a method of low-temperature patterned wafer bonding for complex 3D MEMS. This method employs photosensitive benzocyclobutene (BCB) polymer to create a bonding layer between two pre-processed wafers, enabling the fabrication of intricate MEMS structures.
Career Highlights
Peter has worked at the University of Michigan, where he has contributed to various research projects and advancements in MEMS technology. His expertise in this field has positioned him as a key figure in the development of innovative solutions for microfluidic applications.
Collaborations
Throughout his career, Peter has collaborated with notable colleagues, including Khalil Najafi and Luis P Bernal. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and advancements in technology.
Conclusion
Peter D Washabaugh's contributions to the field of MEMS and microfluidics are noteworthy. His innovative patents and collaborative efforts continue to influence advancements in technology. His work exemplifies the spirit of innovation that drives progress in engineering and science.
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