This inventor holds 1 USPTO granted patent. Top assignee: Acm Research, Inc.. Active years: 2003.
Company Filing History:
Years Active: 2003
Title: Peihaur Yih: Innovator in Electropolishing Technology
Introduction: Peihaur Yih is a notable inventor based in Newark, CA (US). He has made significant contributions to the field of semiconductor technology, particularly in the area of electropolishing metal layers on wafers. His innovative approach has implications for improving the manufacturing processes in the semiconductor industry.
Latest Patents: Peihaur Yih holds a patent for "Electropolishing metal layers on wafers having trenches or vias with dummy structures." This patent describes a method where a dielectric layer is formed on a semiconductor wafer, which includes both recessed and non-recessed areas. Within the recessed areas, a plurality of dummy structures are created to enhance the planarity of a subsequently formed metal layer. The process involves filling the recessed area with a metal layer that covers both the non-recessed area and the dummy structures, followed by electropolishing to expose the non-recessed area.
Career Highlights: Peihaur Yih is currently employed at Acm Research, Inc., where he continues to develop and refine technologies that advance semiconductor manufacturing. His work is characterized by a commitment to innovation and excellence in the field.
Collaborations: Peihaur Yih collaborates with Hui Wang, contributing to the advancement of their shared goals in semiconductor technology.
Conclusion: Peihaur Yih's contributions to electropolishing technology exemplify the innovative spirit that drives progress in the semiconductor industry. His patent and ongoing work at Acm Research, Inc. highlight his role as a key figure in this vital field.