Location History:
- Fremont, CA (US) (2009 - 2017)
- Shanghai, CN (2013 - 2017)
Company Filing History:
Years Active: 2009-2017
Title: Pei Zou: Innovator in Topographical Control and Sample Analysis
Introduction
Pei Zou is a prominent inventor based in Shanghai, China. She has made significant contributions to the fields of topographical control and sample analysis, holding a total of 7 patents. Her innovative approaches have the potential to enhance accuracy in various applications, particularly in metrology and semiconductor analysis.
Latest Patents
One of her latest patents is titled "Method and apparatus for controlling topographical variation on a milled cross-section of a structure." This invention presents an improved method for controlling topographical variations during the milling process. It aims to reduce topographical variation on a cross-section of a write-head, thereby improving the accuracy of metrology applications. The method utilizes a protective layer made from a material that has mill rates at higher incidence angles, closely approximating the mill rates of the structure. Additionally, topographical variation can be intentionally introduced using a protective layer with differing mill rates.
Another notable patent is the "Method for S/TEM sample analysis." This invention provides an improved method and apparatus for preparing and analyzing S/TEM samples. The preferred embodiments focus on enhancing the creation of TEM samples, particularly for small geometry lamellae. The invention also introduces an in-line process for S/TEM based metrology on objects like integrated circuits, aiming to automate sample creation and increase throughput and reproducibility.
Career Highlights
Pei Zou is currently employed at FEI Company, where she continues to develop innovative solutions in her field. Her work has garnered attention for its practical applications and contributions to advancing technology.
Collaborations
Pei has collaborated with notable colleagues, including Jason Harrison Arjavac and David James Tasker. These collaborations have further enriched her research and development efforts.
Conclusion
Pei Zou's contributions to the fields of topographical control and sample analysis demonstrate her innovative spirit and commitment to advancing technology. Her patents reflect a deep understanding of the challenges in metrology and semiconductor analysis, positioning her as a key figure in her industry.