This inventor holds 1 USPTO granted patent. Top assignee: Ooo “Isteq B.v.”. Active years: 2016.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2016
Title: Pavel Viktorovich Seroglazov: Innovator in EUV Light Source Technology
Introduction
Pavel Viktorovich Seroglazov is a notable inventor based in Veldhoven, Netherlands. He has made significant contributions to the field of extreme ultraviolet (EUV) lithography, particularly through his innovative patent for a high-brightness LPP EUV light source. His work is crucial for advancing EUV metrology and actinic inspection of lithography masks.
Latest Patents
Seroglazov holds a patent for a high-brightness LPP EUV light source. This invention provides a method and apparatus for a commercially viable EUV light source. The design utilizes a laser target in the form of a continuous jet of liquid lithium, which is circulated in a closed-loop system by a high-temperature pump. The collector mirror is strategically placed outside the vacuum chamber, filled with an inert gas, and the EUV output is directed through a spectral purity filter. This filter acts as an EUV exit window for the vacuum chamber. Additionally, the input window for the laser beam is coated with a screening optical element, and evaporative cleaning of the spectral purity filter is incorporated. A protective shield, adjustable around the target jet, maintains a temperature higher than 180°C.
Career Highlights
Seroglazov is associated with OOO Isteq B.V., where he continues to develop innovative technologies in the field of EUV lithography. His expertise and dedication to research have positioned him as a key player in this specialized area of technology.
Collaborations
Throughout his career, Seroglazov has collaborated with notable colleagues, including Pavel Stanislavovich Antsiferov and Konstantin Nikolaevich Koshelev. These collaborations have further enriched his work and contributed to advancements in EUV technology.
Conclusion
Pavel Viktorovich Seroglazov is a distinguished inventor whose contributions to EUV light source technology are paving the way for future innovations in lithography. His patent and ongoing work continue to influence the field significantly.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile