This inventor holds 2 USPTO granted patents. Top assignee: Infineon Technologies Ag. Active years: 2003.
Location History:
- Langebrueck, DE (2003)
- Dresden-Langerbrueck, DE (2003)
Company Filing History:
Years Active: 2003
Title: Paul Schroeder: Innovator in Semiconductor Technology
Introduction
Paul Schroeder is a notable inventor based in Langebrueck, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on improving the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Schroeder's latest patents include a "Method and apparatus for determining photoresist pattern linearity." This invention involves a substrate with a measuring pattern printed on it, consisting of a series of parallel lines with a predetermined pitch. By magnifying the semiconductor wafer and analyzing it from a top-down view, the linearity of the pattern feature can be assessed based on the shift in the edges of the pattern. This method can be applied to various pattern features to determine the linearity of the entire pattern.
Another significant patent is the "Self-aligned STI process using nitride hard mask." This process utilizes a nitride hard mask to isolate active areas of a DRAM cell. It involves forming memory cells with deep trenches on a semiconductor wafer, where the trenches are separated from active areas by a substrate region. The nitride hard mask is patterned and etched to create shallow trench isolation, using an etch chemistry selective to the nitride hard mask.
Career Highlights
Paul Schroeder is currently employed at Infineon Technologies AG, a leading company in semiconductor solutions. His work at Infineon has allowed him to develop innovative technologies that enhance semiconductor manufacturing processes.
Collaborations
Some of his coworkers include Tobias Mono and John Pohl, who collaborate with him on various projects within the company.
Conclusion
Paul Schroeder's contributions to semiconductor technology through his patents and work at Infineon Technologies AG highlight his role as an influential inventor in the industry. His innovative methods continue to shape the future of semiconductor manufacturing.