Company Filing History:
Years Active: 2001
Title: Paul Louis Consoli: Innovator in Plasma Processing Technology
Introduction
Paul Louis Consoli is a notable inventor based in Beverly, MA (US). He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique method and apparatus for insulating high power RF electrodes.
Latest Patents
Consoli holds a patent for a "Method and apparatus for insulating a high power RF electrode through which plasma discharge gases are injected into a processing chamber." This processing system is designed for substrate processing with plasma. It features a processing chamber that defines a process space, including a support structure for holding a substrate. A gas inlet introduces process gas into the chamber, while a showerhead disperses the gas. The system utilizes electrical energy to bias the showerhead, forming plasma with the dispersed process gas. The design includes first and second electrical insulator elements that electrically insulate the showerhead from the processing chamber, ensuring efficient operation.
Career Highlights
Consoli is associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in advancing technologies that enhance the efficiency and effectiveness of plasma processing systems.
Collaborations
Throughout his career, Consoli has collaborated with notable colleagues, including Stephen N Golovato and Robert W Milgate, III. These collaborations have contributed to the development of innovative solutions in the field.
Conclusion
Paul Louis Consoli's contributions to plasma processing technology exemplify the impact of innovation in the semiconductor industry. His patent and work at Tokyo Electron Limited highlight his role as a key figure in advancing this critical technology.