This inventor holds 2 USPTO granted patents. Top assignee: Alliedsignal Inc.. Active years: 2000-2001.
Company Filing History:
Years Active: 2000-2001
Title: Paul E Schilling: Innovator in Semiconductor Processing
Introduction
Paul E Schilling is a notable inventor based in Granite Bay, CA (US). He has made significant contributions to the field of semiconductor processing, holding 2 patents that showcase his innovative approach to materials and methods.
Latest Patents
One of his latest patents is titled "Oxidizing polishing slurries for low dielectric constant materials." This invention involves an oxidizing slurry designed for the removal of low dielectric constant materials. The slurry is formed using non-oxidizing particles combined with a separate oxidizing agent, or it can consist of oxidizing particles alone or reducible abrasive particles with a compatible oxidizing agent. The particles may be made from metal oxides, nitrides, or carbides, either alone or in mixtures, and can be coated on core materials like silicon dioxide. This oxidizing slurry is particularly beneficial for chemical mechanical polishing (CMP) in semiconductor processing, but it can also be applied to other high-precision polishing processes.
Another significant patent by Schilling is "Poly(arylene ether) compositions and methods of manufacture thereof." This patent provides dielectric compositions that include one or more poly(arylene ether) polymers. These compositions are characterized by a specific repetitive structural unit and are utilized in various microelectronic devices, including integrated circuits and multichip modules.
Career Highlights
Paul E Schilling is associated with AlliedSignal Inc., where he has contributed to advancements in semiconductor technology. His work has been instrumental in developing materials that enhance the performance and reliability of electronic devices.
Collaborations
Throughout his career, Schilling has collaborated with notable colleagues, including Tian-An Chen and Neil H Hendricks. These partnerships have fostered innovation and have led to the successful development of new technologies in the semiconductor field.
Conclusion
Paul E Schilling's contributions to semiconductor processing through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence the development of advanced materials and methods in microelectronics.