This inventor holds 1 USPTO granted patent. Top assignee: Schlumberger Technologies, Inc.. Active years: 2003.
Company Filing History:
Years Active: 2003
Title: The Innovations of Paul C. Knutrud
Introduction
Paul C. Knutrud is an accomplished inventor based in Marlborough, MA (US). He has made significant contributions to the field of semiconductor technology. His innovative work has led to the development of a unique patent that addresses critical challenges in overlay registration error measurement.
Latest Patents
Paul C. Knutrud holds a patent for "Overlay registration error measurement made simultaneously for more than two semiconductor wafer layers." This patent introduces an improved target and a technique for measuring registration among multiple layers of a semiconductor wafer. The invention involves the formation of at least three layers that overlay each other, with specific patterns designed to ensure accurate registration. The first layer contains a designated pattern, while the second and third layers feature patterns with predetermined shapes and sizes, including discontinuities that facilitate alignment when the layers are registered correctly.
Career Highlights
Throughout his career, Paul has worked with Schlumberger Technologies, Inc., where he has applied his expertise in semiconductor technology. His role at the company has allowed him to contribute to advancements in the industry, particularly in the area of wafer processing and measurement techniques.
Conclusion
Paul C. Knutrud's innovative contributions to semiconductor technology exemplify the importance of precision in manufacturing processes. His patent reflects a significant advancement in overlay registration measurement, showcasing his commitment to improving technology in this field.