Vancouver, WA, United States of America

Paul A Tervo


Average Co-Inventor Count = 3.2

ph-index = 23

Forward Citations = 1,667(Granted Patents)


Location History:

  • Vancouer, WA (US) (2003 - 2008)
  • Vancouver, WA (US) (1993 - 2009)

Company Filing History:


Years Active: 1993-2009

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42 patents (USPTO):Explore Patents

Title: Paul A. Tervo: Innovator in Wafer Probe Station Technology

Introduction

Paul A. Tervo is an accomplished inventor based in Vancouver, WA, with an impressive portfolio that includes 42 patents. His work primarily revolves around developing advanced technologies for wafer probe stations, significantly impacting the field of semiconductor testing.

Latest Patents

Among his latest innovations is the "Probe station thermal chuck with shielding for capacitive current." This invention aims to enhance measurement accuracy by reducing noise and measurement time when probing devices supported on the surface of a thermal chuck. It utilizes a conductive member that intercepts current coupling from the thermal unit to the support surface while remaining capacitively coupled but without direct electrical connection.

Another notable patent is the "Wafer probe station having environment control enclosure." This innovative design includes an integrated environment control enclosure that surrounds the supporting surface of the test device. It limits fluid communication between the interior and exterior, provides electromagnetic interference (EMI) shielding, and maintains a controlled dark environment during measurements. Additionally, this design ensures that consistent conditions are maintained, even during the movement of the supporting surface and probes.

Career Highlights

Throughout his career, Paul Tervo has made significant contributions to the field of semiconductor technology. He held key positions at Cascade Microtech, Inc., among other companies, where he applied his expertise to develop cutting-edge testing technologies for semiconductor devices. His dedication to innovation has positioned him as a notable figure in the industry.

Collaborations

Paul has collaborated with esteemed colleagues in the field, including Warren K. Harwood and Clarence E. Cowan. These collaborations have fostered an environment of knowledge sharing and have led to the successful development of several of his patents.

Conclusion

Paul A. Tervo’s contributions to wafer probe station technology through his innovative patents reflect his commitment to advancing the semiconductor industry. With 42 patents to his name, his work continues to influence practices in measurement accuracy and environmental control in semiconductor testing.

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