The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2006
Filed:
Jul. 25, 2003
Applicants:
Clarence E. Cowan, Newberg, OR (US);
Paul A. Tervo, Vancouver, WA (US);
John L. Dunklee, Tigard, OR (US);
Inventors:
Clarence E. Cowan, Newberg, OR (US);
Paul A. Tervo, Vancouver, WA (US);
John L. Dunklee, Tigard, OR (US);
Assignee:
Cascade Microtech, Inc., Beaverton, OR (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01); G01R 31/26 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
To reduce noise in measurements obtained by probing a device supported on surface of a thermal chuck in a probe station, a conductive member is arranged to intercept current coupling the thermal unit of the chuck to the surface supporting the device. The conductive member is capacitively coupled to the thermal unit but free of direct electrical connection thereto.