San Mateo, CA, United States of America

Patrick A Halahan


Average Co-Inventor Count = 3.4

ph-index = 3

Forward Citations = 141(Granted Patents)


Location History:

  • Sunnyvale, CA (US) (2000 - 2002)
  • San Mateo, CA (US) (2004 - 2009)

Company Filing History:


Years Active: 2000-2009

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5 patents (USPTO):Explore Patents

Title: Innovations by Patrick A Halahan

Introduction

Patrick A Halahan is a notable inventor based in San Mateo, California. He has made significant contributions to the field of semiconductor technology, particularly in the areas of electroplating and electroless plating. With a total of five patents to his name, Halahan's work has advanced the methods used in the fabrication of conductive materials.

Latest Patents

One of Halahan's latest patents focuses on the electroplating and electroless plating of conductive materials into openings within semiconductor substrates. This patent describes a process where a through hole is formed in a wafer, and a seed layer is sputtered onto the bottom surface. The seed layer is strategically not deposited over the sidewalls adjacent to the top surface of the wafer. The invention also includes various embodiments, such as the use of a dry film resist mask and non-conformal physical vapor deposition (PVD) processes to form dielectrics in openings. These innovative techniques enhance the efficiency and effectiveness of semiconductor manufacturing.

Career Highlights

Throughout his career, Halahan has worked with several companies, including Tru-si Technologies, Inc. His expertise in semiconductor technology has positioned him as a valuable asset in the industry. His contributions have not only advanced the technology but have also paved the way for future innovations in the field.

Collaborations

Halahan has collaborated with notable professionals in the industry, including Oleg Siniaguine and Sergey Savastiouk. These collaborations have further enriched his work and contributed to the development of advanced technologies in semiconductor fabrication.

Conclusion

Patrick A Halahan's innovative work in electroplating and electroless plating has significantly impacted the semiconductor industry. His patents reflect a deep understanding of the complexities involved in semiconductor manufacturing, showcasing his role as a leading inventor in this field.

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