Pat Marmillion

Title: Pat Marmillion - Innovator in Substrate Cleaning Technology

Introduction

Pat Marmillion is a notable inventor based in Austin, Texas, recognized for his contributions to cleaning technology. He holds a patent for a unique apparatus designed to clean substrates effectively. His innovative approach has implications for various industries, particularly in the field of precision manufacturing.

Latest Patents

Pat Marmillion's most recent patent is for a "Hot Source Cleaning System." This apparatus features a moveable platen that transports a substrate through a cleaning process. The system includes a first chamber equipped with solvent-dispensing nozzles that wet the substrate surface with a solvent. As the platen moves in a predetermined direction and at a specific scan velocity, the substrate is transported into a process chamber. This chamber contains a hot source positioned at a predetermined height from the substrate surface, directing heat energy toward it. The heat energy evaporates the solvent, effectively removing particulates from the substrate surface. This technology is particularly beneficial for cleaning precision photo-masks and wafers.

Career Highlights

Pat Marmillion is currently employed at NXP B.V., where he continues to develop innovative solutions in substrate cleaning technology. His work has significantly advanced the efficiency and effectiveness of cleaning processes in various applications.

Collaborations

Throughout his career, Pat has collaborated with talented professionals, including Abbas Rastegar and Andy Ma. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Pat Marmillion's contributions to substrate cleaning technology exemplify the impact of innovation in manufacturing processes. His patented hot source cleaning system represents a significant advancement in the field, showcasing his dedication to improving industry standards.