This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Parthiban Balakrishnan: Innovator in Substrate Polishing Technology
Introduction
Parthiban Balakrishnan is a notable inventor based in Bengaluru, India. He has made significant contributions to the field of substrate polishing technology. His innovative work has led to the development of a patented apparatus that enhances the efficiency of substrate polishing processes.
Latest Patents
Parthiban holds a patent for a CMP inner ring in a smart head. The patent describes an apparatus for substrate polishing that includes a housing member, a carrier member, and a distal force assembly. The carrier member is coupled to and disposed radially outward of the housing member. The distal force assembly is located radially inward of an exterior portion of the carrier member and radially outward of the housing member. This assembly features a bladder seal and a seal ring in contact with the bladder seal. The seal ring has a face with grooves that include a plateau radius and a ridge radius, which are precisely defined to improve the polishing process.
Career Highlights
Parthiban is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has allowed him to focus on advancing technologies that are critical for manufacturing processes in these sectors.
Collaborations
Parthiban has collaborated with Tsu-Hui Yang, a fellow innovator in the field. Their partnership has contributed to the development of advanced technologies in substrate polishing.
Conclusion
Parthiban Balakrishnan's contributions to substrate polishing technology through his patent and work at Applied Materials, Inc. highlight his role as an influential inventor in the industry. His innovative spirit continues to drive advancements in manufacturing processes.