Company Filing History:
Years Active: 2019
Title: Parthiban Balakrishna: Innovator in RF Power Technology
Introduction
Parthiban Balakrishna is a notable inventor based in Bengaluru, India. He has made significant contributions to the field of radio frequency (RF) technology, particularly in improving performance metrics in semiconductor manufacturing processes. His innovative approach has led to the development of a unique patent that enhances etch depth performance.
Latest Patents
Parthiban holds a patent titled "Source RF power split inner coil to improve BCD and etch depth performance." This invention features a radial frequency plasma source with a split type inner coil assembly. In one embodiment, the assembly comprises two intertwining coils, while in another, it includes looped coils forming a dome. This design aims to optimize the performance of plasma sources in various applications.
Career Highlights
Parthiban is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display technology sector. His work at Applied Materials has allowed him to collaborate with other talented professionals in the industry, further enhancing his expertise and contributions to innovative technologies.
Collaborations
Some of his notable coworkers include Rongping Wang and Ruizhe Ren. Their collaborative efforts have contributed to advancements in RF technology and semiconductor manufacturing processes.
Conclusion
Parthiban Balakrishna's innovative work in RF power technology exemplifies the impact of dedicated inventors in the field. His patent and contributions to Applied Materials, Inc. highlight the importance of innovation in enhancing manufacturing performance.