Pan Kyeom Kim

Title: The Innovations of Pan Kyeom Kim

Introduction

Pan Kyeom Kim is a notable inventor based in Miryang-si, South Korea. He has made significant contributions to the field of plasma processing technology, holding 2 patents that showcase his innovative approaches.

Latest Patents

One of his latest patents is the "Plasma immersion ion milling apparatus and method." This invention discloses an apparatus and method for low-temperature plasma immersion processing of various workpieces using accelerated ions. The method involves distributing low-temperature plasma around a cylindrical workpiece placed in a chamber. The workpiece is enclosed with a housing that includes a multi-slot extracting electrode to isolate it from the plasma. A negative potential is applied to induce sputtering, allowing ions from the plasma to be accelerated and bombard the workpiece, effectively polishing its surface. This method is particularly effective for surface smoothing of large cylindrical substrates, especially those used for micro or nanopattern transfer.

Another significant patent is the "Method and chamber for inductively coupled plasma processing for cylindrical material with three-dimensional surface." This invention relates to an inductively coupled plasma processing chamber and method designed for cylindrical workpieces with three-dimensional profiles. The workpiece serves as an internal RF antenna connected to an RF power source through an impedance matching network. This design achieves low plasma contamination and confines dense, uniform plasma in the substrate vicinity. The method can be applied to various substrates, including those with planar or three-dimensional structured micro or nano patterns.

Career Highlights

Pan Kyeom Kim has worked with esteemed organizations such as the Korea Electrotechnology Research Institute and New Optics, Ltd. His experience in these institutions has contributed to his expertise in plasma processing technologies.

Collaborations

Throughout his career, he has collaborated with notable colleagues, including Sung Il Chung and Hyeon Seok Oh. These collaborations have likely enriched his work and led to further advancements in his field.

Conclusion

Pan Kyeom Kim's contributions to plasma processing technology through his innovative patents highlight his role as a significant inventor in this domain. His work continues to influence advancements in various applications, particularly in the fields of micro and nanopatterning.